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Kinetics Study on Initial Growth Stage in Vapor Deposition of Organic Thin Film Using Quartz Crystal Microbalance
http://hdl.handle.net/10297/6176
http://hdl.handle.net/10297/6176a2db13d4-3e37-43b9-8cfe-bedda7de445f
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
111004001.pdf (268.4 kB)
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| Item type | 学術雑誌論文 / Journal Article_01(1) | |||||||
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| 公開日 | 2011-10-04 | |||||||
| タイトル | ||||||||
| タイトル | Kinetics Study on Initial Growth Stage in Vapor Deposition of Organic Thin Film Using Quartz Crystal Microbalance | |||||||
| 言語 | en | |||||||
| 言語 | ||||||||
| 言語 | eng | |||||||
| 資源タイプ | ||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||
| 資源タイプ | journal article | |||||||
| 著者 |
Ito, Takaya
× Ito, Takaya× Onoda, Shinya× Kino, Masaaki× Hagihara, Kiyoshi× Kubono, Atsushi
WEKO
3288
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| 書誌情報 |
Japanese Journal of Applied Physics 巻 50, 号 6, p. 060209, 発行日 2011-06-06 |
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| 出版者 | ||||||||
| 出版者 | Japan Society of Applied Physics | |||||||
| 権利情報 | ||||||||
| 権利情報 | © 2011 The Japan Society of Applied Physics | |||||||
| NDC | ||||||||
| 主題Scheme | NDC | |||||||
| 主題 | 431 | |||||||
| 抄録 | ||||||||
| 内容記述タイプ | Abstract | |||||||
| 内容記述 | The deposition behavior of stearic acid evaporated in vacuum was observed using a quartz crystal microbalance technique, and the time evolution curves of the amount of admolecules in the initial growth were compared with a theoretical curve calculated using a rate equation proposed on the basis of physisorption. From the results, it was demonstrated that the proposed rate equation for the early stage of film formation well described the experimental results and the growth kinetics of organic thin films was dependent on the substrate temperature. Basic parameters for thin-film growth, such as the mean stay time on the substrate of deposited molecules, can be estimated from the fitting of the theoretical equation to the experimental results at each substrate temperature. It should be noted that the basic parameters were sensitive to a small change in substrate temperature. | |||||||
| ISSN | ||||||||
| 収録物識別子タイプ | ISSN | |||||||
| 収録物識別子 | 00214922 | |||||||
| EISSN | ||||||||
| 収録物識別子タイプ | ISSN | |||||||
| 収録物識別子 | 13474065 | |||||||
| 出版者DOI | ||||||||
| 関連タイプ | isVersionOf | |||||||
| 識別子タイプ | DOI | |||||||
| 関連識別子 | 10.1143/JJAP.50.060209 | |||||||
| NII書誌ID | ||||||||
| 収録物識別子タイプ | NCID | |||||||
| 収録物識別子 | AA12295836 | |||||||
| 関連サイト | ||||||||
| 識別子タイプ | URI | |||||||
| 関連識別子 | http://jjap.jsap.jp/link?JJAP/50/060209/ | |||||||
| 関連名称 | http://jjap.jsap.jp/link?JJAP/50/060209/ | |||||||
| フォーマット | ||||||||
| 内容記述タイプ | Other | |||||||
| 内容記述 | application/pdf | |||||||
| 著者版フラグ | ||||||||
| 出版タイプ | AM | |||||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||
