@article{oai:shizuoka.repo.nii.ac.jp:00010300,
 author = {水野, 武志 and 清水, ひかる},
 journal = {技術報告},
 month = {Mar},
 note = {application/pdf},
 pages = {59--60},
 title = {技術部部門研修 : 光干渉法を用いた膜厚測定},
 volume = {23},
 year = {2018}
}