@article{oai:shizuoka.repo.nii.ac.jp:00011756,
 author = {Elamaran, Durgadevi and Satoh, Hiroaki and Hiromoto, Norihisa and Inokawa, Hiroshi},
 issue = {SD},
 journal = {Japanese Journal of Applied Physics},
 month = {May},
 note = {application/pdf},
 title = {Investigation of silicon-on-insulator CMOS integrated thermocouple and heater for antenna-coupled bolometer},
 volume = {58},
 year = {2019}
}