@article{oai:shizuoka.repo.nii.ac.jp:00011853,
 author = {Umemoto, Hironobu},
 issue = {10-12},
 journal = {Chemical Vapor Deposition},
 month = {Dec},
 note = {application/pdf},
 pages = {275--290},
 title = {Production and Detection of H Atoms and Vibrationally Excited H2 Molecules in CVD Processes},
 volume = {16},
 year = {2010}
}