@article{oai:shizuoka.repo.nii.ac.jp:00011856,
 author = {Sakamoto, Naonori and Suzuki, Takaya and Kawaguchi, Takahiko and Wakiya, Naoki and Suzuki, Hisao},
 issue = {9},
 journal = {Journal of the Ceramic Society of Japan},
 month = {Sep},
 note = {application/pdf},
 pages = {612--616},
 title = {Low temperature and fast growth of one-directionally grown aluminum nitride film by atmospheric pressure halide CVD method},
 volume = {127},
 year = {2019}
}