@article{oai:shizuoka.repo.nii.ac.jp:00012744,
 author = {Nakazawa, Kenta and Yamamoto, Sho and Nakagawa, Ei and Ogino, Akihisa and Shimomura, Masaru and Iwata, Futoshi},
 issue = {9},
 journal = {AIP Advances},
 month = {Sep},
 note = {application/pdf},
 title = {Atmospheric He/O2 plasma jet fine etching with a scanning probe microscope},
 volume = {10},
 year = {2020}
}