@article{oai:shizuoka.repo.nii.ac.jp:00014510,
 author = {Suzuki, Shota and Mizushima, Yuki and Hamada, Satomi and Koshino, Ryota and Fukunaga, Akira and Sanada, Toshiyuki},
 journal = {Microelectronic Engineering},
 month = {Dec},
 note = {application/pdf},
 title = {Nodule contact path of polyvinyl acetal roller brushes on a rotating plate and its relation to cross contamination},
 volume = {269},
 year = {2022}
}