@article{oai:shizuoka.repo.nii.ac.jp:00002264,
 author = {水野, 武志},
 journal = {技術報告},
 month = {Mar},
 note = {application/pdf},
 pages = {14--17},
 title = {微細加工室の紹介},
 volume = {3},
 year = {1998}
}