@article{oai:shizuoka.repo.nii.ac.jp:00002274, author = {勝野, 廣宣 and 小山, 忠信}, journal = {技術報告}, month = {Mar}, note = {application/pdf}, pages = {21--22}, title = {走査型電子顕微鏡(SEM)の修理}, volume = {6}, year = {2001} }