@article{oai:shizuoka.repo.nii.ac.jp:00002305,
 author = {粟野, 春之},
 journal = {技術報告},
 month = {Mar},
 note = {application/pdf},
 pages = {1--4},
 title = {ダイシングソーによる基盤加工},
 volume = {14},
 year = {2009}
}