@article{oai:shizuoka.repo.nii.ac.jp:00000246, author = {Kudela, Jozef and Odrobina, Igor and Kando, Masashi}, journal = {Reports of the Graduate School of Electronic Science and Technology, Shizuoka University}, month = {Mar}, note = {application/pdf}, pages = {39--44}, title = {Annular Slot Antenna Large Area Microwave Planar Plasma Source}, volume = {20}, year = {1999} }