@article{oai:shizuoka.repo.nii.ac.jp:00000251, author = {Terebessy, Tibor and Kudela, Jozef and Kando, Masashi}, journal = {Reports of the Graduate School of Electronic Science and Technology, Shizuoka University}, month = {Mar}, note = {application/pdf}, pages = {79--84}, title = {Experimental Study of Heating Mechanism in Low-pressure Microwave Plasmas}, volume = {22}, year = {2001} }