@article{oai:shizuoka.repo.nii.ac.jp:00002764, author = {早川, 泰弘 and 大津, 弘毅 and 正木, みゆき and 高橋, 克巳 and 小山, 忠信 and 熊川, 征司}, issue = {2}, journal = {日本結晶成長学会誌}, month = {Jul}, note = {application/pdf}, pages = {227--227}, title = {InSb基板中へのGa高速混入機構}, volume = {24}, year = {1997} }