@article{oai:shizuoka.repo.nii.ac.jp:00002896, author = {Watanabe, Kenzo and Oda, Seiji and Anzai, Mitsuyoshi and Uematsu, Shoichi}, issue = {4}, journal = {IEEE Transactions on Instrumentation and Measurement}, month = {Aug}, note = {application/pdf}, pages = {1155--1159}, title = {A Silicon Micromachined Flow Sensor Using Thermopiles for Heat Transfer Measurements}, volume = {52}, year = {2003} }