@article{oai:shizuoka.repo.nii.ac.jp:00004072,
 author = {水野, 武志},
 journal = {技術報告},
 month = {Mar},
 note = {application/pdf},
 pages = {9--12},
 title = {電子工学研究所クリーンルームの紹介},
 volume = {15},
 year = {2010}
}