@article{oai:shizuoka.repo.nii.ac.jp:00004564,
 author = {Usuki, Shin and Nishioka, H. and Takahashi, S. and Takamasu, K.},
 issue = {9-12},
 journal = {International Journal of Advanced Manufacturing Technology},
 month = {Feb},
 note = {application/pdf},
 pages = {863--875},
 title = {Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift},
 volume = {46},
 year = {2010}
}