{"created":"2023-07-25T10:33:12.813996+00:00","id":4564,"links":{},"metadata":{"_buckets":{"deposit":"020222ac-fb92-4754-aff1-2871ca276640"},"_deposit":{"created_by":3,"id":"4564","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"4564"},"status":"published"},"_oai":{"id":"oai:shizuoka.repo.nii.ac.jp:00004564","sets":["15:564"]},"author_link":["4313","4312","4314","4315"],"item_26_biblio_info_5":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2010-02","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"9-12","bibliographicPageEnd":"875","bibliographicPageStart":"863","bibliographicVolumeNumber":"46","bibliographic_titles":[{"bibliographic_title":"International Journal of Advanced Manufacturing Technology"}]}]},"item_26_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_26_publisher_6":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Springer"}]},"item_26_relation_28":{"attribute_name":"出版者DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1007/s00170-008-1901-y","subitem_relation_type_select":"DOI"}}]},"item_26_rights_7":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright © Springer-Verlag London Limited 2009."}]},"item_26_source_id_19":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"02683768","subitem_source_identifier_type":"ISSN"}]},"item_26_source_id_20":{"attribute_name":"EISSN","attribute_value_mlt":[{"subitem_source_identifier":"14333015","subitem_source_identifier_type":"ISSN"}]},"item_26_source_id_23":{"attribute_name":"NII書誌ID","attribute_value_mlt":[{"subitem_source_identifier":"AA10693929","subitem_source_identifier_type":"NCID"}]},"item_26_subject_8":{"attribute_name":"NDC","attribute_value_mlt":[{"subitem_subject":"549","subitem_subject_scheme":"NDC"}]},"item_26_version_type_32":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Usuki, Shin"}],"nameIdentifiers":[{},{},{},{}]},{"creatorNames":[{"creatorName":"Nishioka, H."}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Takahashi, S."}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Takamasu, K."}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-12-14"}],"displaytype":"detail","filename":"100219001.pdf","filesize":[{"value":"1.2 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"100219001.pdf","url":"https://shizuoka.repo.nii.ac.jp/record/4564/files/100219001.pdf"},"version_id":"e2fcaca7-9642-4575-a7c4-3e27197f861c"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift","subitem_title_language":"en"}]},"item_type_id":"26","owner":"3","path":["564"],"pubdate":{"attribute_name":"公開日","attribute_value":"2010-02-19"},"publish_date":"2010-02-19","publish_status":"0","recid":"4564","relation_version_is_last":true,"title":["Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2024-02-14T03:10:20.510013+00:00"}