@article{oai:shizuoka.repo.nii.ac.jp:00004566,
 author = {Tanaka, Akira and Katsuno, Hironobu},
 issue = {12},
 journal = {Japanese Journal of Applied Physics},
 month = {},
 note = {application/pdf},
 pages = {120217-1--120217-3},
 title = {Formation of Bare Porous Surface on 6H-SiC Substrates by Photo-Electrochemical Etching},
 volume = {48},
 year = {2009}
}