@article{oai:shizuoka.repo.nii.ac.jp:00000489, author = {田中, 昭 and 塩崎, 伸敬 and 安宅, 竜也 and 勝野, 廣宣}, journal = {静岡大学電子工学研究所研究報告}, month = {Mar}, note = {application/pdf}, pages = {107--114}, title = {SiC結晶の低温液相エピタキシャル成長}, volume = {36}, year = {2002} }