@article{oai:shizuoka.repo.nii.ac.jp:00005733,
 author = {Sawamura, Shigeki and Sakamoto, Naonori and Fu, De Sheng and Shinozaki, Kazuo and Suzuki, Hisao and Wakiya, Naoki},
 journal = {Key Engineering Materials},
 month = {Jul},
 note = {application/pdf, Thermal stability of bottom electrode thin films (La0.5Sr0.5)CoO3 (LSCO) and (La0.6Sr0.4)MnO3 (LSMO) were investigated. The crystallization and surface morphology of the heterostructure were characterized using x-ray diffraction and atomic force microscopy. Resistivity of the LSCO thin film was 25 cm. However, the resistivity of LSCO thin film increases sharply with annealing temperature. The LSMO thin film has high resistivity (100 mcm). The film does not decompose after thermal processing at 900 °C. To confirm thermal stability, we examined the effect of post annealing at various temperatures on the morphology and resistivity. Results showed that LSMO has higher thermal stability than that of LSCO.},
 pages = {160--163},
 title = {Comparison of Thermal Stability of Epitaxially Grown (La0.5Sr0.5)CoO3 and (La0.6Sr0.4)MnO3 Thin Films Deposited on Si Substrate},
 volume = {445},
 year = {2010}
}