@article{oai:shizuoka.repo.nii.ac.jp:00005735,
 author = {Nagasaka, Masaomi and Iwasaki, Dai and Sakamoto, Naonori and Fu, Desheng and Wakiya, Naoki and Suzuki, Hisao},
 issue = {1390},
 journal = {Journal of the Ceramic Society of Japan},
 month = {Jun},
 note = {application/pdf, 0.3 M BaTiO3 (BT) precursor solution was prepared by the modified CSD, in which partially hydrolyzed Ti-alkoxide and Ba precursor solution was reacted in iced water bath to prepare the highly polymerized BT precursor solution. The BT precursor solution was spin-coated on a Pt/Ti/SiO2/Si substrate with and without (100)-oriented LaNiO3 (LNO) thin film electrode. In addition, effect of the pre-annealing at 600°C in O2 atmosphere was elucidated by measuring the electrical properties of the resulting BT thin films deposited by the different annealing process. The results clearly indicated that the 600°C pre-annealing and the LNO thin film electrode are effective to enhance the electrical properties of the resultant BT thin films from the precursor solution by the partial hydrolysis method.},
 pages = {498--501},
 title = {Microstructure and electrical properties of BaTiO3 thin films by modified CSD},
 volume = {119},
 year = {2011}
}