@article{oai:shizuoka.repo.nii.ac.jp:00006156,
 author = {友田, 和一},
 journal = {技術報告},
 month = {Mar},
 note = {application/pdf},
 pages = {11--14},
 title = {分光エリプソメータとXPSによる膜厚の測定},
 volume = {18},
 year = {2013}
}