@article{oai:shizuoka.repo.nii.ac.jp:00006161,
 author = {水野, 武志 and 友田, 和一},
 journal = {技術報告},
 month = {Mar},
 note = {application/pdf},
 pages = {33--36},
 title = {SEMの原理と操作実習},
 volume = {18},
 year = {2013}
}