@article{oai:shizuoka.repo.nii.ac.jp:00006636, author = {Okuya, Masayuki and Nabeta, Keigo and Shibayama, Yoshihiro and Kanezashi, Shota and Tan, Masato and Iyoda, Masahiko and Shikatani, Masahiro and Sonohara, Yosuke and Yagi, Isao}, issue = {1}, journal = {Applied Physics Express}, month = {Dec}, note = {application/pdf}, title = {Direct patterning in ZnO film formation by surface discharge technique}, volume = {7}, year = {2013} }