@article{oai:shizuoka.repo.nii.ac.jp:00007853,
 author = {Inokawa, Hiroshi and Satoh, Hiroaki and Kawakubo, Ken and Ono, Atsushi},
 issue = {5},
 journal = {ECS Transactions},
 month = {May},
 note = {application/pdf},
 pages = {127--130},
 title = {Enhancement of SOI Photodiode Sensitivity by Aluminum Grating},
 volume = {53},
 year = {2013}
}