@article{oai:shizuoka.repo.nii.ac.jp:00007854,
 author = {Satoh, Hiroaki and Kawakubo, Ken and Ono, Atsushi and Inokawa, Hiroshi},
 issue = {12},
 journal = {IEEE Photonics Technology Letters},
 month = {May},
 note = {application/pdf},
 pages = {1133--1136},
 title = {Material Dependence of Metal Grating on SOI Photodiode for Enhanced Quantum Efficiency},
 volume = {25},
 year = {2013}
}