@article{oai:shizuoka.repo.nii.ac.jp:00007855, author = {Tiwari, Ajay and Satoh, Hiroaki and Aoki, Makoto and Takeda, Masanori and Hiromoto, Norihisa and Inokawa, Hiroshi}, journal = {Sensors and Actuators A: Physical}, month = {Feb}, note = {NOTICE: this is the author’s version of a work that was accepted for publication inSensors and Actuators A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators A: Physical, Vol 222, 12 October 2014, DOI: 10.1016/j.sna.2014.10.003, application/pdf}, pages = {160--166}, title = {Fabrication and analytical modeling of integrated heater and thermistor for antenna-coupled bolometers}, volume = {222}, year = {2015} }