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Production and Detection of H Atoms and Vibrationally Excited H2 Molecules in CVD Processes
http://hdl.handle.net/10297/00026812
http://hdl.handle.net/10297/00026812a749bcca-b588-4984-aeea-a38831e46c91
名前 / ファイル | ライセンス | アクション |
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190920001 (368.4 kB)
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Item type | 学術雑誌論文 / Journal Article_01(1) | |||||||
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公開日 | 2019-09-20 | |||||||
タイトル | ||||||||
言語 | en | |||||||
タイトル | Production and Detection of H Atoms and Vibrationally Excited H2 Molecules in CVD Processes | |||||||
言語 | ||||||||
言語 | eng | |||||||
キーワード | ||||||||
言語 | en | |||||||
主題Scheme | Other | |||||||
主題 | H atoms | |||||||
キーワード | ||||||||
言語 | en | |||||||
主題Scheme | Other | |||||||
主題 | H2 molecules | |||||||
キーワード | ||||||||
言語 | en | |||||||
主題Scheme | Other | |||||||
主題 | CVD processes | |||||||
キーワード | ||||||||
言語 | en | |||||||
主題Scheme | Other | |||||||
主題 | Laser spectroscopy | |||||||
キーワード | ||||||||
言語 | en | |||||||
主題Scheme | Other | |||||||
主題 | Mass spectrometry | |||||||
資源タイプ | ||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||
資源タイプ | journal article | |||||||
著者 |
Umemoto, Hironobu
× Umemoto, Hironobu
WEKO
561
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書誌情報 |
en : Chemical Vapor Deposition 巻 16, 号 10-12, p. 275-290, 発行日 2010-12-22 |
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出版者 | ||||||||
出版者 | WILEY | |||||||
権利情報 | ||||||||
権利情報 | © 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim | |||||||
権利情報 | ||||||||
権利情報 | This is the peer reviewed version of the following article: Chemical Vapor Deposition. 2010, 16(10), 275, which has been published in final form at https://doi.org/10.1002/cvde.201000043. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. | |||||||
NDC | ||||||||
主題Scheme | NDC | |||||||
主題 | 549 | |||||||
ISSN | ||||||||
収録物識別子タイプ | ISSN | |||||||
収録物識別子 | 09481907 | |||||||
出版者DOI | ||||||||
関連タイプ | isVersionOf | |||||||
識別子タイプ | DOI | |||||||
関連識別子 | 10.1002/cvde.201000043 | |||||||
NII論文ID | ||||||||
関連タイプ | isVersionOf | |||||||
識別子タイプ | NAID | |||||||
関連識別子 | 120006725300 | |||||||
フォーマット | ||||||||
内容記述タイプ | Other | |||||||
内容記述 | application/pdf | |||||||
著者版フラグ | ||||||||
出版タイプ | AM | |||||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||
出版者版 | ||||||||
関連タイプ | isVersionOf | |||||||
識別子タイプ | URI | |||||||
関連識別子 | https://doi.org/10.1002/cvde.201000043 |