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Low temperature and fast growth of one-directionally grown aluminum nitride film by atmospheric pressure halide CVD method
名前 / ファイル | ライセンス | アクション |
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190927001 (6.2 MB)
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Item type | 学術雑誌論文 / Journal Article_01(1) | |||||||||||||
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公開日 | 2019-09-27 | |||||||||||||
タイトル | ||||||||||||||
言語 | en | |||||||||||||
タイトル | Low temperature and fast growth of one-directionally grown aluminum nitride film by atmospheric pressure halide CVD method | |||||||||||||
言語 | ||||||||||||||
言語 | eng | |||||||||||||
キーワード | ||||||||||||||
言語 | en | |||||||||||||
主題Scheme | Other | |||||||||||||
主題 | CVD | |||||||||||||
キーワード | ||||||||||||||
言語 | en | |||||||||||||
主題Scheme | Other | |||||||||||||
主題 | Aluminum nitride | |||||||||||||
キーワード | ||||||||||||||
言語 | en | |||||||||||||
主題Scheme | Other | |||||||||||||
主題 | Low energy cost process | |||||||||||||
キーワード | ||||||||||||||
言語 | en | |||||||||||||
主題Scheme | Other | |||||||||||||
主題 | Thin film | |||||||||||||
キーワード | ||||||||||||||
言語 | en | |||||||||||||
主題Scheme | Other | |||||||||||||
主題 | Nucleation | |||||||||||||
資源タイプ | ||||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||
資源タイプ | journal article | |||||||||||||
著者 |
Sakamoto, Naonori
× Sakamoto, Naonori
WEKO
3113
× Suzuki, Takaya× Kawaguchi, Takahiko
WEKO
9157
× Wakiya, Naoki
WEKO
3112
× Suzuki, Hisao
WEKO
3109
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書誌情報 |
en : Journal of the Ceramic Society of Japan 巻 127, 号 9, p. 612-616, 発行日 2019-09-01 |
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出版者 | ||||||||||||||
出版者 | The Ceramic Society of Japan | |||||||||||||
権利情報 | ||||||||||||||
権利情報 | ©2019 The Ceramic Society of Japan | |||||||||||||
権利情報 | ||||||||||||||
権利情報 | This is an Open Access article distributed under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by-nd/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited | |||||||||||||
NDC | ||||||||||||||
主題Scheme | NDC | |||||||||||||
主題 | 541 | |||||||||||||
ISSN | ||||||||||||||
収録物識別子タイプ | ISSN | |||||||||||||
収録物識別子 | 13486535 | |||||||||||||
NII論文ID | ||||||||||||||
関連タイプ | isIdenticalTo | |||||||||||||
識別子タイプ | NAID | |||||||||||||
関連識別子 | 130007700402 | |||||||||||||
出版者DOI | ||||||||||||||
関連タイプ | isIdenticalTo | |||||||||||||
識別子タイプ | DOI | |||||||||||||
関連識別子 | 10.2109/jcersj2.19038 | |||||||||||||
関連サイト | ||||||||||||||
識別子タイプ | DOI | |||||||||||||
関連識別子 | https://doi.org/10.2109/jcersj2.19038 | |||||||||||||
フォーマット | ||||||||||||||
内容記述タイプ | Other | |||||||||||||
内容記述 | application/pdf | |||||||||||||
著者版フラグ | ||||||||||||||
出版タイプ | VoR | |||||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |