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Atmospheric He/O2 plasma jet fine etching with a scanning probe microscope
名前 / ファイル | ライセンス | アクション |
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200914001 (3.3 MB)
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Item type | 学術雑誌論文 / Journal Article_01(1) | |||||||||||||
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公開日 | 2020-09-14 | |||||||||||||
タイトル | ||||||||||||||
言語 | en | |||||||||||||
タイトル | Atmospheric He/O2 plasma jet fine etching with a scanning probe microscope | |||||||||||||
言語 | ||||||||||||||
言語 | eng | |||||||||||||
資源タイプ | ||||||||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||
資源タイプ | journal article | |||||||||||||
著者 |
Nakazawa, Kenta
× Nakazawa, Kenta
WEKO
9172
× Yamamoto, Sho× Nakagawa, Ei× Ogino, Akihisa
WEKO
143
× Shimomura, Masaru
WEKO
827
× Iwata, Futoshi
WEKO
1806
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書誌情報 |
en : AIP Advances 巻 10, 号 9, p. 095103, 発行日 2020-09-01 |
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出版者 | ||||||||||||||
出版者 | AIP | |||||||||||||
権利情報 | ||||||||||||||
権利情報 | © 2020 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). | |||||||||||||
ISSN | ||||||||||||||
収録物識別子タイプ | ISSN | |||||||||||||
収録物識別子 | 21583226 | |||||||||||||
KAKEN | ||||||||||||||
関連名称 | 17H03156 | |||||||||||||
出版者DOI | ||||||||||||||
関連タイプ | isIdenticalTo | |||||||||||||
識別子タイプ | DOI | |||||||||||||
関連識別子 | 10.1063/5.0017952 | |||||||||||||
フォーマット | ||||||||||||||
内容記述タイプ | Other | |||||||||||||
内容記述 | application/pdf | |||||||||||||
著者版フラグ | ||||||||||||||
出版タイプ | VoR | |||||||||||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |